Company Description

Axcelis Technologies, Inc. designs, manufactures, and services ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe, and the Asia Pacific.

The company provides high energy, high current, and medium current implanters for various application requirements.

It also offers aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services, and customer training.

The company sells its equipment and services to semiconductor chip manufacturers through its direct sales force.

Axcelis Technologies, Inc. was founded in 1978 and is headquartered in Beverly, Massachusetts.

Axcelis Technologies, Inc.

Country	United States
Founded	1995
IPO Date	Jul 11, 2000
Industry	Semiconductor Equipment & Materials
Sector	Technology
Employees	1,465
CEO	Russell Low

Contact Details

Address: 108 Cherry Hill Drive Beverly, Massachusetts 01915-1088 United States
Phone	978 787 4000
Website	axcelis.com

Stock Details

Ticker Symbol	ACLS
Exchange	NASDAQ
Stock Type	Common Stock
Fiscal Year	January - December
Reporting Currency	USD
CIK Code	0001113232
CUSIP Number	054540208
ISIN Number	US0545402085
Employer ID	34-1818596
SIC Code	3559

Key Executives

Name	Position
Dr. Russell J. Low Ph.D.	Chief Executive Officer, President and Director

Latest SEC Filings

Date	Type	Title
Apr 1, 2026	144	Filing
Mar 31, 2026	ARS	Filing
Mar 31, 2026	DEF 14A	Other definitive proxy statements
Mar 26, 2026	SCHEDULE 13G/A	Filing
Mar 24, 2026	144	Filing
Mar 12, 2026	8-K	Current Report
Feb 26, 2026	10-K	Annual Report
Feb 20, 2026	144	Filing
Feb 17, 2026	8-K	Current Report
Feb 12, 2026	SCHEDULE 13G	Filing

View All SEC Filings