Good afternoon, and welcome to Integris's 2020 virtual investor and analyst day. I hope everyone is staying healthy and safe. Just a couple housekeeping items for the webcast for the best performance, as I explained in my email, If it's possible, if you could disable VPN and any other programs as much as you can, I do have a phone number back up in there's some, you know, something happens to your connection and need to access my phone? Just so just just send me an email. There's a pdf slide handout of all the slides on the IR side and also on this webcast tool as well.
There's you see three boxes in front of you. All three of those, you can adjust the size. And then if you need to reset, you can hit that bottom, circle on the bottom of your screen, bottom left that has us, you know, it's a a an arrow and you hit that, it'll reset to the default. We will have a Q and a session at the end of the presentation. Please, enter any questions you have.
You can do it throughout all the presentations or doing the during the Q and A, you can enter them into the box on the left, bottom left. You can also, and make sure to put your company name and company name in there just in case. You can also send me any questions you want over email as well. We expect the program today to be approximately 2 hours, that would include Q And A. And to be clear, we're we today, we'll be discussing strategy and long term, growth potential of the company will not be addressing, the current quarter.
The speakers that are with me today, Rishron Loa, president and CEO, Todd Edlund, our COO, Jim O'Neil, our CTO, and Greg Graves, our CFO. Before we begin, I would like to remind listeners that our comments today will include some forward looking statements These statements involve a number of risks and uncertainties and actual results to differ materially from those projected in the forward looking statements. Additional information regarding these risks and uncertainties are contained in our most recent annual report and subsequent quarterly reports that we have filed with the SEC. Please refer to the information on the disclaimer slide in the presentation. On this call, we will also refer to non GAAP financial measures as defined by the SEC and Regulation G You can find reconciliation tables in the presentation, which is posted on the IR site.
With that, I'll hand it over to Bertrand Bertrand.
Thank you, Bill, and good morning, everyone. It's been a while since our last Analyst Day and since then, the company has continued to perform very well. Meeting and in many cases, exceeding the various objectives we had set out for ourselves nearly 3 years ago. So clearly, a comprehensive update was in order, and this is exactly what we want to accomplish. With you today.
So I would start with a few high level slides to orient you, number 1, and then also to highlight solve the attributes making Entegris such a unique investment option. Next slide, please. So since, its creation nearly 50 years ago, Entegris has changed a lot. And with our revenue expected to reach a 1,800,000,000 this year, we are the largest independently traded specialty chemical company serving the electronics industry. Yet, something that has remained constant for all these years is our mission statement.
And as you can see, at Entegris, we exist to help our customers improve their productivity in the performance and technology. And we do this by developing new materials and very unique process solutions. So What I wanna say here is that the implications of such a mission statement are profound, and they tell you a lot about not only our business model, but also about our mindset as an organization. At Entegris, we want to be viewed as an extension of our customers' engineering teams. Our innovation is the result of very close partnerships with our customers.
And as we collaborate with them, we gain precious insight into their technology road map and we can then identify areas where we can uniquely add value. And this insight informs the management decisions and guides both our organic development efforts as well as our acquisition strategy. So the result of all of this is the platform we have created with very unique capabilities and expertise in a few key areas. Specifically in materials, microcontamination control, and materials handling. So Todd Adlon, our Chief operating officer will describe more fully the various technology platforms, comprising our 3 divisions, and he will discuss our expectations for these 3 businesses.
The last point I want to make on this slide is that by the very nature of our solution set, we sell across the entire electronics ecosystem. 90% of our revenue is tied to the semiconductor industry. And as you can see, 50% of our products are used by fab and users while the rest is sold to equipment makers and chemical suppliers. Another unique attribute of Entegris is that we have a very resilient platform, and there are a few different ways you can think about this. As you can see on this slide.
1st, most of what we do are consumable products. And there can be materials, chemistries, filters, that are used in our customers' daily manufacturing processes. Our solutions are sticky. And the reasons for that is our solutions are increasingly tailored to unique customer process conditions, and therefore, the switching costs are high. And that means that once our solutions are designed into the process recipe
of our
customers, We can enjoy a steady stream of recurring revenue for as long as these fabs remain in operations. And I will provide a little bit more context about the useful life of Semiconductor Fabs later in my presentation. So another way to think about resilience and stability is that our offering is very broad. We set approximately 15,000 products, And we only have a few platforms reaching $50,000,000 or more in annual revenue. And this means that We are not overly dependent on the success of 1 or 2 products.
In fact, our opportunity pipeline is very broad and very well balanced as you will see later today. Finally, as you remember from my previous slide, We have a very diverse customer base, more so than any traditional supplier to the semiconductor industry. So while we have very strong relations with every industry leaders globally, we only have one customer. Representing more than 10% of our revenue. Now it is often the case that the resilience of a business platform comes at the expense of top line growth.
And I would tell you that it's really not the case with Entegris. We've been able to deliver on both fronts. So let me turn to the next slide to review, the recent performance of our top line. As you can see here, clearly, our top line growth has been very strong in the past 5 years. We experienced a renaissance in our core semiconductor market, which grew well in excess of GDP.
You can see that in the in the dark and and and light gray bars. Respectively. But more importantly, we were able to outpace the industry organically very meaningfully, and that's in the the light blue bar on on the graph. And we added another couple of points of growth from acquisitions we made along the way. All this, translating into an average, top line growth of about 11%.
And superior shareholder return over the period. Now, of course, none of this matters. It's all in the rearview mirror. And the question in everybody's mind on the call today is, can we do it again? And the short answer to that question is yes.
And over the next few presentations, we will detail for you how we intend to do this all over again. But in summary, if you go to the next page, please, the conviction you will hear from our management team is based on on the following factors. The semiconductor industry is poised for strong secular growth. The industry technology road map is evolving very favorably for Entegris, and you will learn today that our value proposition centered around materials and material security is increasingly important. To many new technology inflections.
Our growth aspirations are ambitious, but they are credible. They are backed by very concrete plans, a very capable team, an increase, an intense focus on the customer, and substantial investments to compete effectively in the marketplace. Finally, we expect to generate attractive cash flow levels, which will give us additional optionality to create incremental shareholder value. So I will cover all of these elements in more detail, but, obviously, all of this starts with growing the top line. And the next slide illustrates how we are thinking about this.
So let me start with the headline. Over the next three years, as you can see, we expect to grow organically 9 to 10%. To put this in perspective, This is a growth rate very similar to what we have accomplished and delivered in the previous 5 years. And there are 2 high level ways to unpack this growth rate. The first and probably the simplest way to think about it is the industry growing at twice the rate of GDP and integrates outpacing the industry by 3 to 4 100 basis points.
The alternative way to think about it is as a combination of Sam expansion and share gain. And I am sure that some of you are already trying calculate our SAM growth. So I I will make it easy for you, and I would give it away. You can see that over the planning period, we expect our SAM will grow at an average of 8% per year. So a little bit of share gain.
Over the planning period, but mostly it is about SAM expansion driven by 3 main forces. The first one is an acceleration of chip demand. The second one is the growing integrase content per wafer The last one is more wafers being produced at the leading edge. So let me dive a little bit more into each of these 3 components. And if we go to the next section, we'll start with the industry lift.
I don't think I need to spend too much time on this. And if we go on the next slide, I think you've seen many versions of of of similar slides. You remember the various phases of expansion and stagnation of the semiconductor industry and how Wafer start growth has been comparing against GDP growth over the past decades. What is exciting today is that the industry is entering a new phase of hyper growth. The world is increasingly interconnected.
Massive amounts of data are being generated at an financial rate every year. So clearly, the digitalization of our lives is happening. Actually very rapidly, as a matter of fact. And we are witnessing this 1st acceleration this year out of necessity during the current pandemic with the emergence of new norms around work and and run from home. But this is just the beginning, and things will accelerate even further once the 5 g infrastructure is in place And once new applications take full advantage of the new network speed to transform our cities, our health care and transportation systems and so much more.
So all of these upcoming trends will drive demand for semiconductors to new highs. And in that context, we believe that it is reasonable to expect that the semiconductor industry could outpace GDP by a factor of 2 for the years to come. So let's go to the next section, please. So as I said, the, you know, the primary industry we serve, the semiconductor industry will enjoy strong secular growth, and this is great. This is a very foundation from solid foundation upon which we can build.
But of course, you want, and we want to continue to grow faster than the industry, and we will do this by identifying areas in our served markets that are expected to grow faster than the rest of the industry and by gaining exposure to those emerging growth areas. So in my next three slides, I want to call out a few of these exciting growth areas for us. And I will try to quantify how our served markets per wafer is expected to evolve. But remember that the numbers you will see are directional and that our customers are constantly looking at ways to improve their yields and consumption rates. So, with that disclaimer, let let's let's go to to the slide that you already broadcasted, Anna.
So the first slide illustrates, why the next years will be rich in opportunities for our SCM division. As a result of the compounding challenges of miniaturization, high aspect ratio device architectures, and the migration to nano wires. All of this combined with a big push for better interconnect materials. And let me tell you, I have been in this industry for 20 years, and to be honest, I do not recall a period of such activity, such intensity in new materials development in a very long time. In fact, if ever, And that observation is really what leads me to claim that material science will be increasingly driving the industry roadmap.
And as such, the opportunity, our, sample wafer could be very significant across the various industry segments and, in particular, in 3 d NAND, as you can see here on, on these charts. Jim O'Neil, our Chief Technology Officer, will discuss us in detail how our solutions that enables these tall structures in in so many ways. But at high level, Let me just say that there are 2 major areas of opportunity for us. The first one is in Deposition Materials. And it would be an opportunity for us to leverage the capabilities that we, acquired with ATMI in 2014.
Capabilities that we strengthened with the acquisition of DSC and MPD last year. The second area of opportunity for us will be in selective etch. And as an aside, you should know that the critical additives in these etching chemistries are developed and manufactured at DSC, one of the two companies we acquired last year. So clearly, all of these acquisitions have been very relevant, but also very timely for us. So the takeaway of this slide is that our SCM division is uniquely enabling higher bit density, faster compute, and better energy efficiency.
Next slide, please. Another very important theme behind our SAM expansion is the need for greater purity. Our customers that are aiming at introducing smaller feature sizes and taller architectures which is a very daunting combination. And to accomplish this, they need greater retention across a wider array of atomic level contaminants. So tight contamination control is this central for our customers for at least 2 reasons.
The first one is to reach acceptable yields by removing killer defects second reason is really to improve the long term reliability of the chips by removing latent defect. And, and, Jim, we'll talk a little bit more about that. As a result, the opportunity for wafer for our liquid filters in the fab environment continues to grow nicely, both in logic and in advanced memory. This is a tailwind that you're familiar with, the tailwind that we've been enjoying for some time now. And based on our active collaboration with the industry leaders, we expect similar opportunities to develop for the years to come as purity requirements continue to become more stringent, more difficult to achieve, and as we continue to advance our technology.
On this next slide, this is really, in fact, the flip side of the same coin. This is the 2nd dimension to our purity theme. And the opportunities that it creates for us. Essentially, what I'm trying to say on this slide is that if our semiconductor fab customers want to achieve ever greater level of security without compromising their throughput. They need to subject their chemical suppliers to much more stringent purity requirements for incoming chemicals delivered delivered to their fabs.
The reason this opportunity upstream in the ecosystem is accelerating for us is that a growing number of chemistries are required to achieve greater and greater purity levels. And this need for cleaner and more exacting standards up and down, the supply lines are opening many new opportunities, not just for our liquid filters, but also for our high purity packaging solutions. So increasingly, I want you to think about Integris as playing an advisory role with the chemical suppliers on how to best enable and control the purity, the stability, and the safety, of electronics materials across the ecosystem from bug manufacturing all the way to the point of delivery to the fab. With volumes of chemicals used on the rise, as you can see on the upper left, of this slide, this will be another very powerful tailwind for both our microcontamination and AMH divisions. So moving to the next slide, this is really the final driver that I wanna call out, in terms of time extension.
And let me be clear. It's a driver entirely outside of our control, yet it's very real, and it's very powerful. And what you can see on the next slide, the two graphs, showing, really the steady push forward, the steady transition of more and more wafer production to the leading edge. You can also think about these two graphs, by the way, as an illustration of the rate of obsolescence of process technology in both logic and and memory. And as you know, and as you can see here, clearly, we have longer life cycles for logic fabs.
And we have shorter life cycles for memory technology nodes. So a couple of takeaways for you here. So you can see by 2022, approximately 25% of the wafer produced in logic fabs will be at 20 nanometer technology or below. And in that same time frame, we expect almost all, 90% of the 3 d nand chips to have 96 layers or more. And this is, of course, very positive for us since, as you recall from My previous slides, we expect greater integrase content per wafer at these advanced nodes.
So now it's actually probably a good slide and a good time for me to to make a few additional disclaimers. As I said earlier, number 1, we do not control the timing or the magnitude of these technology node transitions. And yet, they have significant impact on our performance. Point in case in the in year, like 2020, when many customers, both in memory and logic, transitioned successfully, and therefore, rapidly to new nodes, you can expect us to handsomely beat the industry growth. Conversely, in years with fewer node transitions or more challenging node transitions, you should expect our growth rate to be closer to the industry growth rate.
So let's go to the next page, please. So if I wanted to to summarize my previous four slides, I would say that the semiconductor industry road map is becoming increasingly challenging. And that these challenges translate into many new exciting opportunities for Entegris. But at the same time, our customers have higher expectations of their suppliers in general and off integrase in particular. And you should know that as a management team, we recognize this, and we are very focused on strengthening or differentiation and owning the various facets of our value proposition.
Let me touch a little bit more on that on the next slide. You can see, you can recognize on the left, the flywheel, which is really spelling out how we think about customer centricity and integrase. And if you have been following integrase for long enough, you have seen different versions of of that flywheel. And you may even be tired of it. But, well, let me just say that exact expect me to continue to use it because I genuinely believe that our constant and disciplined focus on this flywheel has been fundamental to our success.
It highlights the critical steps we want our customers to experience when they engage with us. And as a team, as a management team, we are constantly focused constantly thinking about what we need to do to improve the customer experience at every crank of the flywheel. We are constantly reflecting on engagements. We just completed and projecting forward on the new opportunities we are chasing with the objective to improve at every crank. So as I like to say, it's it's a lot more than a model.
It's really a mindset. And Entegris, which ultimately leads to a very strong organizational alignment centered on on on a shared purpose. On on the right side of the page, you can see the 3 pillars of our value proposition, technology, operational excellence, and the required infrastructure to effectively support our customer driven innovation model globally. And as I said earlier, we are constantly assessing with the input not only from our global teams, but also our customers, the capabilities that we need to add or strengthen in order to further differentiate from the competition. So Todd Hedron, our chief operating officer, will discuss these three pillars in in more detail in in a moment.
So let's go to the next, section. Greg Graves, our Chief Financial Officer, will review our capital allocation framework more comprehensively, but I wanted to touch briefly on our M and A strategy, which will remain an important focus for us in the years to come. On the next slide, when it comes to to acquisitions, our beliefs areas of focus and and guiding principles will essentially remain the same. First, Given the nature of our business model, we believe there is a strong correlation between creating differentiated customer value and creating long term shareholder value. In other words, expect us to focus on M and A activities, and on platforms that can enhance our capabilities, enhance our value proposition and ultimately enhance our brand.
The second point I wanna make on this slide is that we will focus on technologies and applications at markets that we believe can help sustain our top line growth, outperformance. So expect us to remain very focused on Advanced Materials And Separation Technologies primarily and to a lesser extent on materials handling technologies. Finally, expect us to remain disciplined in our execution. From the moment we screen, assess and value potential targets to to the care and and speed that, we put into the integration work, in order to unlock their their full potential. On the next slide, and we can probably skip ahead two slides just introducing our, financial objectives.
By 2023, we expect our top line will reach approximately $2,400,000,000 organically. We expect to increase our ROIC to 20% and to deliver a non GAAP EPS between $3.75 $4. I want you to note that this EPS range includes both the organic EPS as well as the incremental earnings we expect to generate from our capital allocation decisions. And Greg will review all of these numbers and the underlying assumptions in in in a lot of detail. So, I probably will not go a lot beyond that in my section.
So let's move to the next slide. And in the next section, we wanted really to, use our time together today to formally introduce a very exciting initiative, which is really our corporate social responsibility framework. And on the next slide, You can see that, it's a pre comprehensive program. And it's really statement that both the management team and the board of Fintegris wanted to make. We recognize the impact and the responsibility we have to our people, to the environment, and to the communities where we operate.
And as an organization, we want that impact to be as positive as possible. The framework we are presenting today is a a more formal commitment to many initiatives that historically have had a less structured focus within within the company. So we have chosen to build our framework around 4 pillars, innovation, safety, personal development, and inclusion and sustainability. We chose these 4 pillars very carefully. We wanted them to closely connect not only to our value system, but also to the value proposition of Integris and our business strategy.
Safety is a good example of of of of this intent. Safety is obviously a key focus in our workplace, and on the integrates shop floor. But the safety of our customers is also top of mind in our innovation process. When we develop new product platforms for semiconductor or even for adjacent markets. A good illustration of this mindset, is the modest yet critical role in Tigris is playing in the fight against COVID 19.
A few years ago, we launched our Aramus high purity bags for biologics. The properties of the aromas bags are unique in the marketplace, or bags are gamma sterilizable. They can also withstand cryogenic temperatures, which means they will not break in cold temperatures. And this means that our bags could play a very critical role in the effective distribution of the vaccines. And by reducing bag rupture during transportation, We would allow more people to have access to a vaccine faster and more efficiently than using more traditional technologies.
So I do not I do not have the time to cover each pillar in great detail, unfortunately. So please visit our website learn more about our CSR program, get acquainted with our 2030 goals. For our goals, I just wanna mention that we chose a 10 year horizon simply because we wanted our goals to be bold. And we needed to give our teams enough runway to break the mold and reinvent ourselves. I just wanna say that in many cases, we expect we will be able to reach these milestones earlier than 2030.
For instance, the goal that our board of directors selected for themselves, is a is a good reflection of that. We expect to achieve 50% diversity in the boardroom well before 2030, obviously. So this will be a very exciting journey for all of us. A journey doing which we will demonstrate that it is absolutely possible to do the right thing and to create lasting economic value. So stay tuned as we will, of course, update you along the way.
In closing, on the next slide, I would like to summarize what I hope will be your takeaways from our 2020 Analyst Day. 1st, we participate in an exciting tree that will enjoy very strong secular growth. We will not spend a lot of time on this topic because our assumption is that you probably would not be on this call if you did not share that view. The second big takeaway is that our exposure to emerging technology inflections is accelerating, which in turn translates into a very rich and diverse opportunity pipeline. Jim O'Neil will shed a lot more light on this.
The third point is that we compete very effectively. And as a management team, we are laser focused on raising the bar constantly. Our quest for excellence is a journey, not a destination. And Todd will discuss some of our areas of focus, very shortly. 4th, our business model is more resilient than most in the 3 participants.
And it is, as I mentioned earlier, a function of the inherent stickiness of our consumable business model as well as the quality of our execution. Point number 5, our recurring revenue model is also the reason for our strong cash flow performance. And lastly, I would want to say that we have earned the reputation of being a smart allocator of capital and a very effective acquirer. So in other words, Integris is a value compounder, and this is something that Greg Graves, our CFO, will unpack for you at the end of our presentations today. So this concludes my section, and I will now turn the virtual stage to Todd Edwin, our Chief Operating Officer.
Todd?
Great. Thank you, Bertrand. Happy to be here today to talk about this company that we've built over the last 50 plus years and, and the great opportunities that has not only demonstrated we can deliver, but we expect to be able to deliver for years to come. Over these decades, we've really built integris to be a very effective trusted partner to the semiconductor industry, one of the most demanding industries there is. And we've learned a lot about how to do that.
And and as Bertrand mentioned, we've already started to look for ways to do that in other places, but semi remains our focus. And so what we've really done is focused on semi and how we can evolve to serve the most important needs of the industry as Bertrand to described, and Jim O'Neil will also describe. So really we look for how can we find those places where we can bring a lot of value that will outgrow the general pace of the industry. So it's materials. Materials performance is critical to the advancement of the industry.
It's the safe and effective delivery of those materials, which is key focus area of Entegris, how do you get that material safely to the fab, how do they use it safely in the fab, and how do they get the most efficiency out of the use of that material. And then very uniquely, Entegris also brings the ability to work on defect reduction through contamination control, contamination prevention, damage prevention, and deliver yield. And ultimately, that's what our customers are after is yield. So move to the next slide. So we're trying to show you this.
This is how we live. It's really about, these three pillars we've learned, and continue to believe, give us competitive advantage and are the focus of our investment to be that trusted partner to the Semiconductor industry. And I'll describe each of these in the slides, coming up so we can go to the next slide. So starting with technology, This is the number one important thing that we have to do to win. Have the best solution and have it first.
That's where our our key focus is on, especially for the leading edge. So that starts with, making sure we have the applications expertise to be in the room, when customers are describing their needs, when they're developing solutions, they can see us as a as a helpful partner to have their to actually help them get to solutions faster. So applications knowledge is one of the most important things that integers possesses. Then you have to back it up with significant r and d investment. You know, we typically per spend between 7 and 8% of our revenue on, R and D.
We expect that to grow, as we'll describe later, during the during the plan period. Because it is the most important thing we have to continue this outperformance that we've been enjoying as these new nodes are launched. We have to also do that close to our customers. So we, we have tech centers, technology centers in our most important markets around the world. They can provide places where our customers actually come and work with us to develop solutions to their needs.
And and that's one of the most valuable things we have. The right people, the right capabilities, you know, close to the customers. At the end of the day, then they have to be able to count on us to take that new product and ramp it very quickly as they roll out a note. And there's two examples shown here of that on the left Trental 2, 2 nanometer filter is one of our most advanced and more recent wet etching clean filters. This shows you the, the steepness of the ramp we've had to go through in a 1 year period to, to get from sampling all the way to high volume manufacturing.
On the right, also for middle precursors, one of our fastest growing businesses in the company. This shows you a very similar challenge that we've also faced with that business. Get it right Get the data on it and be able to ramp it very quickly to match our customer's needs to quickly get to yield. So the technology portfolio is not just r and d, how you turn it into, a high volume manufactured product. Go to the next slide.
So global infrastructure. This is again, as I mentioned, being close to the customers is key 2020. Put a stamp on this. It was the year where, everybody in the industry was highly focused on supply lines, making sure that we could be responsive, not only to the restrict on travel and movement of goods that COVID caused, but also on geopolitical uncertainties and concerns about trade. And so we were able to demonstrate the unique ability of Entegris with its global footprint and multiple manufacturing sites across Asia and across the United States to respond and adjust, to our customer's needs.
I'm very pleased say that when the industry turned out to be stronger than we feared it might be at the beginning of the COVID crisis, we were able to respond and keep our customers running. And that was, as you saw from our growth this year, it was a significant challenge, but we were prepared for it because of the way we built the company. We've built our Asia plants, and you can see the growth in the revenue that comes from those Asia plants for our global needs. As well as our Asia headcount. We're 50% or more today of our of our customer facing resources, including technical people that interface with the customers.
Are near the are nearer customers. So that's all great, but the other thing that's really exciting about this and perhaps most exciting to me is that the growth of the company has led us to have a need for more manufacturing space. We have significant footprints in the US in Korea, in Japan, in Southeast Asia. And we saw the need for a new facility with more footprint especially for the strong growth of the MC division, the SCEM divisions. And so we are planning right now, a we made a commitment to a new Taiwan Manufacturing Center.
This will be our largest manufacturing campus, and it'll be beginning in 2021. And we'll be building it out over the few, the next few coming years because we need the volume. And so that's the main thing we're after there. Of course, it's near our largest customer, which is very convenient. And again, shows our focus on having, tight supply lines close to our customers, reducing the dependence on logistics, and being able to serve our customers in Asia well.
So we're very excited about that and there'll be more information coming about that plant in, in a few weeks to come. So we'll go to the next slide. And then operational excellence, in this industry that we're in, customers are more focused than ever on the effectiveness of their supply chain and depend dependability of supply chains. Our customers' most painful excursions have generally come from excursions not safety that we actually can demonstrate we can have that down to our supply chains as well so they can be confident, we'll be able to continue to supply consistently, over time. And that's their main focus is consistency of product, consistency of quality, and the data to prove it.
So a couple of the measures that Bertrand talked about is our our focus on quality. You can see our Sigma level. Has grown past 5 Sigma. I'm very proud of that. It's it's grown a lot over, a many years' efforts to constantly push our quality reputation higher and higher in our performance to go with that.
Our injury rates are safety performance. You can see is improved markedly. I would say in the last 18 months, we've become especially focused on safety and, more and more proactive programs to build a culture of safety and integrity. The other good thing about Entegris, because of the size of we what we are, the scale we are, and the things that we do, we can actually influence materials development. So our suppliers, care about what we need to have, and they're actually, willing to work with us to deliver the kinds of quality purity and performance that we're looking for.
And the next step of that is really, con continuing automation, in our factories for quality and manufacturing, but also for applying our data. We have a lot of data that and our customers expect us to gather, and we're putting that to use to improve our productivity. So that's all sounds good, but the most important, evidence that this works is on operational excellence. So if you look at, at the, awards at the bottom there, this is a thing where I think we're most proud of is we've, in the last 12 months, received awards from some of our critical customers, both equipment manufacturers and 2, large, device manufacturers that influence these awards. Recogn recognizing the value that Integris is bringing, recognizing our ability to ramp, production and our ability to perform consistently.
So that's a very important endorsement, from our customers that obviously has also manifested itself in our growth. So now each time we do a Analyst Day, I'd like to give you a quick refresher on the divisions. I won't spend too much time here because you've seen a lot of this before. And Bertrand described them a bit in his remarks too. So the Specialty Chemicals And Engineering Materials division, this is the division that's largely unit driven that's putting things on the wafer and in touching the wafer with almost everything they do, to help these process, processes and the steps in these processes yield and produce the performance and the output that they they're looking for.
So these are the deposition materials, specialty chemicals for cleaning special etch chemist trees, for what Jim will describe are some of the significant challenges of those vertical architectures that Bertrand mentioned, specialty gases for implant and then CMP chemistries for some hard substrates as well as some other components and using semi CMP. So you'll see the growth drivers are gonna be familiar from Bertrand talking about materials intensity, the need for novel materials. These are all the things that the SCM division is responsible for. Responsible 2. The SAM that you see, I'll just note each of the SAM numbers you're gonna see are only Semiconductor.
So the SCEM division in particular has many applications and other markets that have demanding materials needs. But the SAM you'll see today is is focused on semi, which is still our number one focus as a company. So the next slide. So in the middle, you'll see the key growth opportunities and those match up to the, the drivers, that we've been talking about. They talked about in the previous slide, advanced deposition materials are fastest growing business inside of SCEM.
We've continued to win in, both the memory and logic space and are enjoying ramps this year. You can see the big growth in in revenue this year for SCEM. Ramps in those new nodes are especially helpful to this division because our because of our share position, in these new notes. Selective edge chemistries goes with that. And then advanced coatings, and rolling out to help in crew cost of ownership and reduce downtime of equipment such as etch chambers.
And we actually use it in some of our products to prevent corrosion in how we deliver materials. We win because we have the, ability to not only get these gases pure, get these solids pure, but deliver them in a pure way in an effective and efficient way. That's one of the most important, competencies of Integra's ability to deliver these materials. Now I mentioned lastly, their chemical synthesis. So, Bertrand mentioned some of our acquisitions in the chemical space, such as DSC and MPD.
These give us the opportunity to vertically integrate to the development and synthesis of our chemistries from the molecular level. So we're expecting this division to continue to grow. It's been growing about 7% a year. We expect it to continue to grow about 300 to 500 basis points above the market rate. Next, please.
So the microcontamination control or MC division, this is our our largest and our fastest growing division. This is what really makes Entegris unique, that we can bring not only materials, but we can provide the means to, make them and keep them pure. It's largely unit driven, you know, liquid filters and purifiers that are used in bulk manufacturing of chemicals, as well as, quite extensively through the fab. Environmental filters. I'll show you a little bit more about that later.
And then some of them are capital driven, are gas filters that go into a lot of gas equipment and manifolds, and then larger purifier systems that the gas companies use to make sure they deliver the appropriate level of purity to the fab, usually at the fab. The growth drivers here is purity. High purity needs that the Semiconductor industry has and then the yield challenges, that that contamination causes So we can actually make a big impact here, where a lot of other chemical companies are aren't is able aren't able to do that as, on their own. So next slide. So the growth opportunities, I have everybody suspect's leading edge and that's not surprising.
That's an important part of our focus forward in development. But, as interestingly now, part of what's driving this growth is the, the the flowback of those requirements from the device manufacturer through their chemical manufacturers. So we work very closely across the chemical manufacturer ecosystem to bring them the latest capabilities we have in filtration and purification and enable them to provide, the fabs with the purity levels that they're seeking. And that's been a big part of the growth, as the as those requirements that I mentioned earlier are being flown down flowed down to sub suppliers. We've been helping them to be able to achieve that.
Obviously, the semi market is our major focus, but we also see opportunities in non semi markets in some of our acquisitions such as Al are focused, more on some other markets besides semi and give us a chance to learn more about how we might grow in those as well. Separation science is key here, but the number one thing that that allows us to apply that is our applications expertise, our ability to work with the end users and the OEMs and the chemical companies to help them solve these problems, and have the knowledge to do that is extremely important. We expect this business. It's growing as you can see very, very quickly. This is as reported sales over these years, and then, to continue to grow 3 to 500 basis points above market.
So very exciting business for us at Integra Next slide. And the materials handling, as Bertrand mentioned, you know, this is part of the the heritage of Entegris founded, you know, 54 years ago to help with wafer handling for an AC and semiconductor industry. We still are the leader in that today. This business has got a mix of unit driven and capital driven products. But even the capital driven products, they're typically refurbished or reused after some period of time to maintain the performance, that they need to have in these very advanced fabs.
This is where you're gonna see unit driven products such as drums and containers for liquid packaging. As Bertrand mentioned, we've taken what we've learned in package things like photoresist and our materials knowledge. We started to apply that to some life sciences applications. You can see the biologics bag there. A representative of what he was, mentioning relative to our work, around COVID.
So we're shipping away for shipping of liquids protecting them in that in that time on their way to the fab in the ecosystem. A big part of what AMH does. And then in the fab, the fluid handling a measurement and control, especially with our acquisitions of PSS and GMTI recently. Certainly has enhanced our capability around that. And then wait for handling where we're the world leader.
So the growth drivers, high purity needs, protecting those substrates, protecting those chemicals, And then, of course, the increase in materials consumption is driving the drum business, and I'll talk about that on the next slide. If you look at the key growth opportunities, chemical packaging, our biggest challenge right now is just adding capacity, over the next couple of years, we will double our capacity for manufacturing of high purity drums. That growth will come in Asia because that's where we, we need it. That's where the, the chemicals ecosystem is ramping up to serve, you know, the growth in Asia that the industry is expected to continue to have. So we're very excited about that.
We're making real time right now additions to our chemical packaging, capacity to serve that EUV lithography. So as the leader in technology around EUV, reticle handling. We're very excited about EUV and the proliferation of that notes, it's a good thing for the MH business. And then safety, there's a lot of focus on safety in the fabs, as Bertrand mentioned, they they care about, how our safety is in our factories, but also very importantly, the safety of our products that are used in the fabs. And again, this is another area where the business can see opportunities outside of semi and some of those acquisitions I just mentioned.
Give us, an additional view into that. So you can see our expectation here. This business grows, a little more in line with the market. It has some high share in a couple of positions here. And we can expect it to continue to outperform the market about 100 to 200 basis points.
So the next slide. The other thing about AMH, that you've heard me talk about before is that it's also a supplier to the other 2 divisions. It's one of the things I think is most exciting about Entegris and why, we're so happy to have the 3 divisions, within our portfolio. They help each other. So if you start on the upper right there, when PMH is actually a state of the art mold molder of advanced polymers, the largest consumer of high purity grades of fluoropolymers in the world.
And that, we can apply that to make components for our filters. So the EMH division is a component provider, designer provider to the MC division. In the bottom there, you can see, we're also not surprisingly as supplier of things like chemical drums and packaging to the SCEM division. Unique opportunity here is that, we're right now bringing up a care capability in Korea to actually blow mold the drums, the Ultra Pure drums, and actually fill them in the same site with some of our our chemistries from the SCEM division. So that that's a very unique opportunity for Entegris.
I think most interesting too is if you look at, the intersection between SCEM and MC see. Matching filters to chemicals is absolutely essential these days. We work with the chemical manufacturers and the IDMs and the OEMs, a lot of cases, to design, filtration and purification solutions specifically for their chemistry. And there's a lot of that unique, need today in how you design a filter solution. And we can do the same with the SCEM division.
So we can move quickly to develop filters that are specific to emerging chemistries that the SCM division's working on, and we can get to a solution that works well together, and get there fast. So that's the main goal we have with the combination there. But all you leads to yield in the end. All of these things help our customers yield faster and ramp their manufacturing more quickly. If we do well at coordinating between the between these divisions.
So next slide. So I won't spend time on this one. This is the kind of a takeaway gives you kind of a view of what we do around the ecosystem. So the next slide. So to summarize, it's all about speed to yield.
For Entegris, we have the material solutions. We provide the materials protection, and that gets us faster to that yield that the customers are after. We win by the 3 main areas. I just talked about the technology portfolio and our applications knowledge. Makes us first the table as a solutions partner our global infrastructure lets us execute quickly on development and ramp those solutions and then our operational excellence provides a consistent performance that our our customers demand.
With all of that, we've established ourselves as a smart choice for our customers these capabilities together in our in our proven performance, build that trust, to be that trusted partner, that makes us a winner. With that, I'll turn it to Jim O'Neil, our CTO, to talk some more more specifics about these applications.
Great. Thank you, Todd, and good afternoon, everyone. Today, I want to explain how Entegris is innovating for growth. I'll highlight several technology trends that our customers are wrestling with and explain why Integris is uniquely positioned to address them. Next, chart.
So first let's start with our innovation process. At Entegris, we innovate within a strong product management culture, and we have significant discipline about how we manage the portfolio. We have a rigorous stage gate process based on an accolade platform, and we have a lot in that portfolio. Ideas typically enter the process through our own R and D and from external work we do with universities and consortia, as well as with our customers. And we make choices about where we want to invest our R and D dollars.
Clearly, the main focus is to execute projects through the portfolio, but in my view, healthy portfolio is dynamic. So we work to actively call projects that aren't headed in the direction that we need them to be going. And we've chosen to invest at the leading edge. This is primarily driven by the long development and adoption lead times for leading edge technology. And if you don't invest early, you'll never intersect the customer's qualification dates.
Over the last two years, we've increased our R and D spend so that now more than half of our project spending is directed towards innovation for advanced node technologies. And the choices we've made have enabled a portfolio that we think is adequate to support our ambitions for growth. Our future sales growth is supported by real opportunities in the R And D pipeline. So a few words about the technology roadmap, which I think is getting quite interesting and is moving in a way that's very good for integrys. The struggle that our customers face is to come up with the innovations that keep them on a Moore's Law trajectory.
They've had to develop new device architectures and new patterning schemes to enable the aggressive density and performance gains that are demanded by their customers. However, underlying all this innovation is a foundation of new materials. These new materials have been required just to enable advanced devices and new patterning schemes. And these new device structures are really small. If you consider that the critical dimension of a transistor On today's most advanced logic technology is about 5 nanometers across.
That's about 40 to 50 atomic diameters. If you compare that with a strand of DNA that has a diameter of about 2 nanometers, you can see that we're truly engineering materials on a comic scale dimensions. So clearly this is not only challenging, but it requires extreme control of defects, control of materials purity, and it puts unique requirements on the materials that are used to make these structures, things like high chemical selectivity for etches, and high conformality for deposition precursors. So our customers are literally facing tall challenges. If you consider the structure of any of the main device types in both memory and logic, They're all heading in the same direction.
They're all getting smaller and taller. So making these structures requires new materials, It requires engineering these materials with atomic scale precision and control at part per quadrillion level purity, and 0 defectivity, all at the same time. So fabricating these devices is increasingly complicated, and this makes yield learning for our customers even more challenging. So this is actually a perfect situation for Entegris, more materials and more yield challenges. And from my perspective, that's really the combination that Entegris does best.
And our customers are increasingly recognizing these facts, and we know this because they come to our tech centers, they bring their wafers, They work with our engineers on their challenging problems. And to me, that's really the true value of our tech centers. And frankly, that's also how we learn. This type of interaction has happened over and over again in our labs in Taiwan and in Korea, and it's beginning to get So the industry is truly moving toward Entegris. Advanced node Technologies use more materials.
And that's good for Entegris. And the number of process steps required to fabricate these advanced devices is also increasing. This means that there are more opportunities to introduce yield limiting defects. So that's good for Entegris too. And this increase in materials usage and process complexity is especially pronounced for 3 d NAND technology because of the number of, increasing number of layers in the device.
And so consistent with this trend, We've seen for 3 d NANDSA going from 64 layers to 128 layers. We see Cbd steps are increasing by nearly 50% and wet steps by 36%. And for Logic Devices, the number of ALD steps is up 33% And why processes have also increased, even though some thought they would decrease due to the implementation of extreme ultraviolet lithography. So Entegris is increasingly relevant as technology nodes advanced. So where are we focusing our attention today?
Well, I'm gonna show you 4 industry inflection points and illustrate why Entegris is uniquely positioned to address them. The next section is gonna get a little technical, but I think it's important to understand the trends that are going on in the industry. Next chart? So the first inflection point is the trend towards vertical integration. As lateral scaling and by that, I mean, pattern shrinking or device miniaturization, as this becomes increasingly difficult to achieve, our customers are beginning to integrate into the vertical dimension This is especially apparent with 3 d NAND structures where a taller vertical stack translates into increased memory density.
But these vertically integrated devices are difficult to make. The structures are taller and increasingly narrow this brings the challenge of engineering materials with atomic scale precision on high aspect ratio structures. There are a greater number of materials in these stacks So this calls for high selectivity of both etch and deposition processes. The resistivity of conductive layers becomes a challenge at these reduced dimensions. So new metallurgies are required to meet the resistance and reliability requirements.
And defects control is critical, you'll never yield these devices. So for this particular 3 d NAND example, Entegris brings to the table things like a highly selective nitride etch chemistry to form the metal channels in the structure. New atomic layer deposition metal precursors to fill them. Materials like molybdenum as a candidate, but there are other metals that are being examined as well. And we have the ability to deliver solid forms of these precursors, as well as metal specific cleans and the matched filters to go with them.
So you see that Entegris brings a complete set of materials and yield solutions to this rapidly growing memory market, and 3 d NAND has been a very good market for Entegris. Next chart? The second inflection point has to do with the wiring that interconnects all the transistors on a chip. Historically, tungsten and copper are the medals of choice for this application. But copper in particular has a problem that it requires a barrier layer to prevent it from diffusing throughout the device and causing reliability problems.
As the wiring shrinks Copper lines become more resistive and less reliable, so a new metal is needed. Options include materials like Cobalt, or ruthenium or molybdenum, all of which are in Entegris' portfolio. But changing the metal causes a cascade of downstream effects, A new metal means new electric chemistry, so subsequent wet processes like CMP chemistries and cleans need to be reformulated. And new formulations require new filtration schemes since today's filters are made from chemically modified polymer membranes, And you need to be sure that when a complex chemistry comes in contact with a chemically modified membrane that they're compatible, otherwise, neither the filter nor the formulation will work. So they need to be developed together, and as the provider of both the chemistry and the filter, This is where Entegris clearly has an advantage.
The next big inflection point is in the area of patterning so continued device miniaturization is finally being enabled by the introduction of stream ultraviolet lithography. And I'm a little biased on this one because before coming to Entegris, I spent time leading process development at IBM Albany operation, which was an early EUV adapter. And from that experience, I understand some of the challenges that are posed by EUV. There are new resist materials, new mask materials, new pellicle materials, all of which require their own defect learning. Due to the statistical considerations based on the energy of an EUV photons, something we call stochastic noise, EUV lithography has a built in level of process variability.
And what this means is that all other forms of variability have to be controlled And so random defect learning is even more important at these small dimensions. And to address these opportunities, Integris brings a number of solutions to the table, including defects control in the form of resist filtration or resist handling and delivery, and reticle pods that are used to protect the mask. And we also bring new materials that can be used to make pellicle membranes as well as novel films that can be used as absorber layers on the EUV mask. So overall, EUV adoption is great for integrys. It drives new materials and defects control opportunities that we're actively engaged in.
And just consider the state of the industry today, 7 nanometer node is in manufacturing now, and that was where we saw the first introduction of EUV. The 5 nanometer node is ramping, and there you see more extensive implementation of EUV. The 3 nanometer node is in development, and you'll see further expansion of EUV as well as the possible introduction of a new device architecture called gate all around transistors. And 2 nanometer node structures have been demonstrated using EUV double patterning techniques So EUV is a rapidly expanding opportunity for Entegris with a tremendous extendability. Next chart?
So the last major inflection that I'm gonna talk about is the drive towards 0 defects. Industries like the automotive industry, particularly with the rise of autonomous vehicles, this places new requirements on device reliability, and this includes both mainstream and advanced node devices. We already know that small defects can kill device yield, and even smaller defects can cause reliability fails in the field. So this puts increasing pressure on continued defect control. With increasing process complexity yield ramps are even more difficult to achieve.
The real challenge, however, is that for advanced node technologies, we can't even see the defects that we need to remove. A 7 nanometer node technology can be killed by a 3 to 4 nanometer defect. And latent defect latent reliability defects are even smaller, but in line defect detection equipment that you see in the fab can only detect defects down to about 15 nanometers or so. So speed to yield and reliability learning are a real challenge And this isn't just for advanced nodes. This is, for mainstream node technologies, which have their own increased reliability requirements.
So again, this creates enormous opportunities for Entegris. We provide the pure performance materials that are used to make these advanced devices, but frankly, that alone is no longer sufficient. A complete solution requires the ability to filter and further purify materials throughout the supply chain and it requires the handling and delivery solutions that are needed to ensure the integrity of the material from the point where we make it. To the point where our customers actually use it on the wafer. So these increased reliability requirements that are driven by industries like the automotive industry drive Sam growth for defects control solutions for both mainstream and leading edge fabs.
Next chart. So why is Entegris uniquely positioned to take advantage of these inflection points? Well, I'd argue it's because of the breadth of our portfolio. So let's consider a specific example that leverages the whole integra's portfolio. It involves the metallization of a 3 d NAND memory device.
So historically, the conductor for each cell in these tall memory structures has been tungsten, but as more layers are added to the structure, say something greater than 200 layers. The resistance of the overall device increases, so we need a new metal, and molybdenum is one candidate material, but there are others. But this seemingly simple change sets up a cascade of effects downstream, new clean formulations, new filters, and you need to ensure the integrity of the formulation that we've made all the way to the wafer. And this plays that can do all of that at the same time. Next chart.
So what does all this mean for Entegris? Well, clearly, we are currently experiencing an unprecedented number of process innovations in the semiconductor industry. The increased demand for semiconductors means more silicon in both memory and logic, and more silicon means more materials. These advanced devices require pattern miniaturization and atomic scale processing. The industry inflections drive the need for advanced performance materials, and improved defect control.
And these changes create opportunities, which integrys is uniquely positioned to address, I think all of this plays into what we've tried to build at integrase, which is a unique portfolio of materials and defect control solutions, that our customers need if they have any hope of leading their most, yielding their most advanced memory and logic devices. And, you know, when I look forward, I think it's a really good time to be integrys. So thank you. And at this point, I'd like to introduce Greg Graves, who's the Entegris chief financial officer.
Alright. Thank you, Bertron Todd and Jim for the great setup. So, really, my presentation today, there are 2 components to it. I'm gonna provide a little bit of historical perspective, and then we'll look forward a bit. So next slide, please.
So thinking about the historical perspective, this is our historical revenue EBITDA and EPS. I want to unpack it a little bit, but starting on the left hand side of the page, revenue from has gone from essentially 1,100,000,000 to a little over $2,550,000,000 of growth over the last 5 years. And I'd note that we had a full year of ATMI in 2000 15. So much of this growth has been organic. EBITDA has gone from 230,000,000 to 536,000,000 or an increase of a little over 300,000,000.
Why do I highlight those numbers? If you take 300,000,000 and divide it by 700 and $50,000,000. The growth in revenue, you come up with about 41%, which has been our commitment in terms of flow through to the EBITDA line. The the other point that I'd like to make is just on the revenue side, you know, we've achieved our commitment of industry outgrowth of 2 to 300 basis points. I mean, that 11% CAGR, 9% of that is organic, the market has grown about 5%.
So well exceeded that. And then obviously, have exceeded it on the EPS line. Let me unpack this a little bit on the next slide. So this is what we refer to as our multiplier model you could've I could've started with one more bar to the left and that there's a multiplier element to the market, and then our market grows at about twice the rate of GDP. What I'd like to, you'll note, I mean, our revenue has grown at 2.2 times the market.
Our EBITDA has grown at 1.6 times. So these simple algorithms that we talk about, sometimes I say our model is very simple. It's outgrow the market by a few basis points, drop 40% of it through to the bottom line, and you get an EBITDA growth rate that is It's at one point six times the revenue growth rate. And then effectively allocate your capital, manage the balance sheet well, manage the tax rate effectively, and our, EPS growth is 1.3 times the EBITDA growth. So this is what we'd like to refer to as our multiplier model, and for Trump said at the beginning, can we do this again?
And we think when you unpack it and think of it as just outgrowing the industry by a few 100 basis points generating that flow through. So we do think we can do it again. So next slide, please. So let me talk a little bit about our capital allocation principles. There's really, nothing new here, but I think what's important to note is, 1st of all, we've been very consistent with how we've talked about capital allocation, and I believe we've been disciplined in terms of the capital allocation.
So three components, It's investing in the business. It's investing in value accretive acquisitions and it's returning capital to shareholders. First of all, when we think about e r and d, we've historically invested 7 to 8%. Our goal is to invest 9 percent of sales in the R and D. I used the term invest, and Jim alluded to it at the beginning of his presentation.
We very much take an investment approach to how we allocate our R and D dollars. And this is something we frankly, under Jim and Todd's leadership, have gotten much better at. CapEx, 7 to 8 percent of sales might not be that way consistently every year. There'll be years where it's more years where it's less, but over time, expect see us invest in the business. You don't get the capabilities that Todd described without investing in capital.
Value accretive acquisitions are a big part of what we're gonna do. We intend to be a consolidator. We think one to to some degree, our execution has earned us the right to do that. Most of what we're targeting is in within that core semi market, every a few of the transactions we've done, we've gotten some adjacent markets as well, but the the primary focus will be the core semi market. And then we talk about returning cash, to shareholders.
We talk about a 60% payout over time. So that might not happen every year, but over a long period of time, we expect to return 60% of our free cash flow to shareholders. Through dividends and buybacks. Next slide, please. So What have we done with the capital allocation over the last few years?
So we've spent $1,600,000,000 on acquisitions $800,000,000 invested in the R and D, 650,000,000 invested in CapEx, And I I like you said, I just wanna remind everybody, those are very much investments that have allowed us to to drive that top line. And then $340,000,000 on buybacks and $120,000,000 on dividends, so about $460,000,000 return to shareholders. I'd note that return to shareholders has primarily been in the last 3 years. We didn't implement the dividend till 2017. Nor did we become consistent buyers of our stock till late 2017.
So if you were to look back over the last 3 years, At 460, we've returned to shareholders amounts to about 60% of our free cash flow. Next slide, please. So just a a little bit of a summary on our acquisitions. I mean, we've done 9 transactions. Since 2014, 2 of those transactions have accounted for 75 percent of that 1,600,000,000 spend, and that's APMI, which was about half of it in SAFE, which represented about 25% of it.
The rest of the transactions were relatively small talk ins. We've all had some exposure to our core semi market, and about half of them have given us exposure to other markets. Strategically, they've all been very important. I'll just highlight a couple, the SAES Pure Gas transaction, build a significant hole in our portfolio around gas purification and specifically high flow gas purification. The DSC and MPD transactions gave us molecule synthesis capabilities and have been a very significant boost to our deposition business, A now increased our exposure in China.
And Sinmette, you know, gave us an, entry into the CMP slurry market. The other thing they've obviously done is they've been a huge contributor to value creation. If I if we had not done these transactions, our sales in 2020 would be $700,000,000 less and our EPS would be about 600 or about 60¢ less. So they have been very value accretive from an earnings perspective. Next slide, please.
Let's shift our focus a little bit and talk about why I feel so good about you know, where we stand today and and and our future. First of all, we've got a great capital structure. I sleep really well with this balance. Sheet. It's both.
It's conservative, but it and it gives us a fair amount of flexibility. It's conservative and that we, you know, consistently maintain at least a couple $100,000,000 in cash. Our EBITDA target on an ongoing basis, our leverage to EBITDA target is 2.0 We're very focused on maintaining that strong double b rating, which will allow us to access to the credit markets in good times and bad. And if you're looking at the lower right, we don't have any significant maturities till 2025. The other thing this balance sheet gives us is optionality.
I talk about a gross leverage target of 2 times, but we've talked about our willingness to take that up to 3.75 times for significant M and A opportunities, that alone gives us a $1,000,000,000 of firepower with the existing balance sheet and the existing existing EBITDA Anything we buy will bring additional EBITDA. So we've got we've got the flexibility to do meaningfully sized transactions. Next slide, please. I wanna talk a little bit about, you know, why we're so confident in terms of our ability to continue to expand our EBITDA margin. Historically, we've obviously focused on productivity and efficiency.
Wouldn't be able to deliver the returns that we have without it. But in the last 18 to 24 months, we've made it much more of a central theme in the organization. About 18 months ago, the finance organization in conjunction with the rest of the team said, let's make productivity in the functional areas cool, so to speak. I mean, it's cool to be innovative in the e r and d part of the world, but to make it cool to be productive in other parts of the organization. So what are we doing?
I mean, we're standardizing processes. We're simplifying. We're centralizing automating, and we're making greater use of shared services. We've established a shared services facility in Penang, Malaysia, where we're moving a lot of our regional finance functions. We're moving a lot of our or a number of our IT roles there as well.
And those will all make us more efficient. Where are we doing it? We're obviously we're not doing it in the R and D. We're doing it so that we can continue to invest in the R and D, continue to invest in our core, business, but we're doing it primarily in the SG and A functions to supply chain functions, a lot of the high transaction count type functions. And there's benefit just beyond the productivity and efficiency.
As we do these things, we also increase the scalability of our business model and the ability to add things to the business a number of the acquisitions that we've added recently, we've almost immediately taken the accounting function to the shared services operation. And so this scalability is an important factor as well. Next slide. And why is the productivity important? It's really important as we wanna continue to drive this 40% incremental flow through that we've talked about.
Doesn't sound like a big number, but when you look at that multiplier model over a period of 5 years, it makes a big difference in terms of our ability to grow the the profits significantly faster than the revenue. So this slide, we've operated to a target model for a long period of time. The left hand side shows, at a 1,800,000,000 in revenue it roughly looks like this year's P and L will be a little bit ahead of that on the EPS line, but the idea being at a 1,800,000,000 in revenue, our commitment 24 percent operating margin, 29 percent EBITDA. As you move out and you work through, essentially, with that 40% flow through, you'll see, you know, you get out to $2,400,000,000 that up that EBITDA margin has expanded to 32%. And EPS has moved from 2.35 to 3.55.
And that's assuming the same levels of debt that we have, a essentially the same share count and essentially the same tax rate. But this commitment to the 40% flow through is an important concept. And while trees don't grow to the sky, we're comfortable that we can continue to deliver on it. I think the important way to look at the flow through however is showed it over a 5 year horizon. There are gonna be quarters where we don't achieve it.
There might even be years where we don't achieve it. For instance, in 2018, we didn't achieve because we've made an acquisition of a significant business that had EBITDA margins of 30%. It's hard to get a 40% flow through on revenue from an acquisition. That has less than a 40%, EBITDA margin. Point is from a organic perspective committed to this flow through as we go forward.
So what does that mean when you when you take what we've talked about the growth rates, roll to the next slide, please. What does that mean when we we talk about where we're starting from in 2020 and where we think we'll be after 3 years? So Bertrana laid the foundation for that 10% top line growth if we grow 10% annually over the next 3 years, that'll take us to 2,400,000,000 in revenue. You reflect back to the target model at 2.4 We'll have a 32% EBITDA margin, 300 basis point improvement over where we are, and that's, again, based on that 40% flow through. And we'll have non GAAP EPS of $3.55.
So the other thing I wanna highlight on this page, we're introducing new targets around our return on invested capital. Today, our return on invested capital is about 16% believe we can take that to 20% over a 3 year time horizon. The return on invested capital is an important concept for us everything we do is driven by, essentially, returns. Jim talked about it at the beginning. Our R and D portfolio, there's an NPV and an ROIC on the entire on on each major initiative within the r and d portfolio.
Obviously, our CapEx is driven by that And as Bertrand showed, when we evaluate M and A, we're looking for an ROIC in the high single digits by year 3. So ROIC is an important component to everything we do. So we wanted to lay a milestone goal out there for that as well. Next slide, please. So to get from that 355 that I just showed you to the 3.75 to $4 that Trron talked about, you obviously have to take capital allocation into account.
So this is this is just some, for instance, scenarios. And the first one is a share repurchase. I mean, if we can keep our leverage at the existing level of two times EBITDA, and we benefit from an expanding EBITDA and the cash flow that we generate. If we were to use that cash to repurchase shares, at our current multiple, which is about 25 times forward earnings, we would generate about 10, 10 additional sense of accretion by using that capital in that way. If we were to use it and are able to effectively find M and A at reasonable valuations, which we use here as 14 times EBITDA, that same employing that same capital on M And a would provide 25¢ of accretion.
And then again, we talk about being willing to take that leverage level up for transformational M and A. So if we were able to find a transformational transact, lever to 3.5 times, we believe we can generate an incremental 50¢ per share. These are hypothetical scenarios at one level. They're just math. But what we want people to understand is, obviously, the balance sheet has optionality for us.
And if we're effectively using our cash flow and our balance sheet, we're gonna generate returns above and beyond the organic. So the 355, I showed you organically, plus, kind of the midpoint of these numbers takes you to that 375 to 4 bucks. That Bertrand talked about at the beginning. Next slide, please. I'd just like to summarize, you know, six reasons that, you know, to own integrators.
One is we have an exciting industry environment with, you know, really good secular growth trends. I mean, I I think of where this industry has come over my career in TEGRIS, the breadth of where Semiconductors are used. The the breadth of the applications, has really driven significant growth. The transition to solid state memory, again, a big growth driver. And Jim touched on some of how that will impact an integrase.
And finally, the industry has become a better industry as there's been consolidation. There's more industrial logic. It's a much more rational industry, I believe. And then we Jim outlined the our exposure to the key technology inflection points those are all were gonna allow us to grow in excess of the industry. We've got a really strong competitive moat.
We've got a great IP portfolio, both in the form of our patent portfolio, our no know how as well as the significant applications expertise that we have. We've got a resilient business model. I mean, our products are sticky. We could qualify it in, and we've got products that are twenty years old that are still chugging along. We've got a diverse customer base.
We've got a diverse mix of products. All of those things make us a very resilient company. We're a big cash generator. We've always generated significant cash flow, and we think we'll continue to generate significant cash flow. And finally, you know, we're disciplined allocators of capital.
And we believe I I showed you some of the options that we have with regard to that cash flow and the capital that we generate, but those are essentially icing on the cake of the strong execution that we intend to continue to deliver and that we've delivered historically.
So in the end, I mean,
we think we've got an opportunity to continue to compound value. With that, I'll turn the back over to Bill for the Q And A session. Alright.
Thank you very much. And I have been getting, questions in over email and and from the chat function. So I will get started here. If you have more, please send some over. So we'll start with, Sydney Ho from Deutsche.
So, this one will be go to Bertrand. So and it'll be a 2 part one. So, Bertrand in your slide and you showed the business mix and the customer mix,
when
you think about that customer mix, and you think about the mix between foundry and memory, How do you see that evolving over the next 3 to 5 years?
So I think, again, one of the attributes of integrase that is actually so unique is this very broad and and diverse customer base, and we are fortunate enough to sell to most participants in the industry and most segments of the industry. Having said that historically, the industry road map of our logic and foundry customers has been a lot more challenging than the roadmap of the memory makers. And historically, as a result of that, we've had more opportunities to contribute to, the logic architectures. But it is changing very, very rapidly. As you've heard, Jim described, and I have actually provided some quantification of of that statement.
So, if I wanna summarize all of this, I would say that Today, memory represents about 30% roughly of, the revenue we generate with fab customers. I would expect that number to, you know, migrate to close to 50% over the next 3 to 4 years, depending, on the phase at which we see the migration to 96 layers and and and higher layer count structures.
Okay. And then another follow-up from from Sydney we mentioned in a few places, potential growth out growth opportunities outside of semi, what are some of these potential areas?
So we we we have, historically always try to be opportunistic in, adjacent applications and markets. And and typically, you know, customers from, you know, industries outside of Sami would would come to us, looking for for solutions to emerging problems that they are facing. And, And in some cases, it actually makes sense for us to put R and D monies to work and and to develop some derivatives of product platforms that we have developed for semiconductor applications. So, the industry is where we see the most opportunities for us going forward would be, medical, life science, and and and to some extent, aerospace applications as well. But but again, I think that given the rate of growth that we expect in our core semi markets, I don't I don't expect a non semi portion of our business to grow meaningfully beyond the 10% that it represents today.
So expect that that portion of the business to be within 10, 12, 13%, of our total revenues in, you know, in the next 4, 5 years.
Okay. Got a question from David, David Silver, CL King. Jim, and I'm gonna paraphrase here a little, David, but, Jim, in terms of the R and D projects you laid out, what are the 1 or 2 key ones that, you know, a year from now or so will you will judge whether we're successful or not, the ones you're most excited about.
Yeah. So I mean, I I think the ones that we're most excited about are the ones that are targeting the greatest areas for growth. So I would look at things like the, the work that we're doing in our SCEM division on, deposition precursors, deposition precursors of the form that we call atomic layer deposition materials. These are the the precursors that are used to fill those high aspect ratio structures both in memory and logic. We're already beginning to see some traction there.
We think that with, some further work that we're doing in 3 d NAND that that should be, you know, something that we're, that we can be proud of, I think we'll be successful. I think we can be proud of it. Another major area of innovation is, in selective etch chemistries. It's no longer just you know, providing chemistries that can remove one material, on the wafer, but being able to remove a material selectively in a very complicated stack of materials similar to what you find in advanced, devices. This is becoming significantly more we're seeing many more demands or calls for it from our customers, and I think we're beginning to get some traction there.
And then the other the the other major area is in innovation surrounding the fundamental performance of membranes and filters. I mean, I think as you get to defects that are sub 10 nanometers, sub 5 nanometers, you need something more than a better sieve. You need a you need a membrane that is chemically modified or functionalize, just selectively remove contaminants. And that takes a lot of innovation and a lot of know how And I think we're we're very good at that, and it's in huge demand right now. I mean, you think if just if you look at the success of our Toronto 2 filter, things that follow that are are other areas that are very exciting.
Alright. I got a follow-up from David here on, for Greg. So based on your history of, steady incremental M and A, how do you rate your capacity for taking on more M and A and all the related integration challenges?
So what I would say is I'm thankful that, at one level for the COVID year this year because we did not do as much m and a after doing five transactions in a little over a year. In, you know, 2019 early 2020. So we've had an opportunity to, you know, get ourselves positioned integrating those businesses. So I think we do have capacity for additional transactions as we move into next year.
Okay. I'll I'll go back to, Jim on your one. This is from Toshahari from Goldman. You have explicit financial criteria for your R and D investments. If so, what are they and how our business unit leaders evaluated incentivized for, you know, their follow through and hitting these targets.
Yeah. I mean, I think that the the one of the primary things we look at is, the percentage of revenue that we can generate, the percentage of our total revenue that new products generate. And we have sort of a loose goal of, sort of a vitality rate of something, you know, in the range of 30% to 35% something in that range. You know, clearly, we want, new products, to carry a a higher margin than the products that they're replacing. And, in order for that to happen, they have to be differentiated.
And so we really need to be able to ensure that the new things that we're coming out with are are so differentiated in the industry relative to our competitors. So we have metrics around that, as well.
Now, Bill, would you like me to add a little bit to that?
Sure.
Yeah. So just a couple things. We put every project up against financial criteria for return on investment as as Greg mentioned. And they're they're measured equally against other opportunities for investments. So we set a business goal for every project that we actually do.
We call them lessons learned to rearview mirror. Reviews of these projects after they've been out in the market for a while to see if we met those or not. And if not, why not? And apply those lessons learned a few projects. In terms of motivating and and incentivizing the business leaders with regard to that, on when they all have goals every year in in some case, compensable goals around, the margin performance of the business, the growth of the business, winning of new applications and new nodes, which require those new products.
And then very specifically on the performance of some of their top projects, the kind of projects that, Jim, described. Recently. So there's a very tight, tie of performance and accountability, to be able to delivering in those R and D dollars.
Great. Bertrand. So this is from Mike Harrison from Seaport Global you mentioned looking at filtration options outside of semi. How similar is the science? And will it does it mean you can do it organically or inorganically to get into the non these non semi markets and filtration in particular?
Alright. So so there are some similarities, but there are also, an a lot of differences and, this is actually one of the reasons that led us to acquiring a now in, q 4 of last year. This company that is based in China actually brings a lot of the capabilities that we were lacking and integrates. And I think that the combination of the two platforms will actually be a very powerful combination, bringing some of the breast membrane scientists to work together with, you know, the right application knowledge, with with, you know, the the the the the medical and and excellence applications in mind. So it's gonna take a few years for us to develop, the right platforms, but, I believe that there are opportunities for us to unlock in, in, in, in the field.
Okay. Another one, Bertron. So Patrick Ho, Stifel, how do you decide between, when you're thinking about R and D development, how do you decide between building it organically or inorganically. In other words, using M and A to supplement what you have, and what are the kind of key metrics that you look at when you think about that
So, you know, I would I would give you, I mean, the theoretical answer would go along the lines of what Todd and and Greg we're mentioning. I mean, it's really about assessing the risk, processing, the return on on the investment. And remember what Todd said in this presentation, which is actually something very, very important. Our customers not only expect the best solutions, but they expect that within a specific and usually very narrow time frame. So so time to solution is very important.
So All of those criteria are really something that we think about in the context of 2 major decisions. The first one is looking at existing applications, existing markets that we serve today. And then the other series of opportunities will be you know, the white space. So areas where we don't play today. And and and we need to make those decisions of internal development versus acquisitions for those two areas.
And I'll give you a couple of examples. So in the case of, deposition materials 6 years ago, we realized that this was an area where there would be some really, really exciting growth potential. But Integris at the time didn't really have any abilities. So we decided to acquire ATMI. And after that, we made a lot of internal investments to grow the capabilities grow the global footprint of this particular business.
But a couple of years ago, we realized that we were not going fast enough mean, we had built some very credible capabilities in, your lab scale, synthesis capabilities, pilot scale, and applications, but we didn't have high volume manufacturing capabilities. We were still relying on a network of suppliers and it was a limiting factor. So we had to decide to either invest internally and the high volume manufacturing or or acquire those, synthesis capabilities. And we decided we decided to go and and acquire DSC and MPD simply because we didn't have the time to invest, you know, internally. So again, I think that we are constantly having those discussions as a management team.
I think we are a team that is very pragmatic. So there is really no, you know, wide of, not invented here. And, and we I think we've we've we've demonstrated that we can be very flexible in terms of what we choose to develop internally versus what we decide to, to acquire and bring into the portfolio.
Okay. I got one for Greg, from Paritas Misra from Berenberg. So we talked about the 40% flow through as a total company, how do you think about incremental margins in the 3 separate segments?
Let me think about that for a minute. So I would say as we go forward, and Todd, Todd showed it in his presentation, if think about the SDEM business, the incremental margins are
are
probably higher than they are in the MC business. We've made significant investments in CEM over the past few years, and so much of that is behind us. Whereas in the MC business, we've got significant investment ahead in terms of capacity. So we won't see what we'll we'll see higher margins than we have today, but we won't see significant of a flow through. And then we'll, you know, continue to see improvement in the AMH business last quarter, we saw 23%.
I told people not to hold on to that number, but I'm hopeful that we're out of the days where we see numbers in the teens for that
Alright. It's from Chris Capps from Loop. So Bertrand, Chris asks, what sort of MSI expectations do we have over the period to 2023 And did do you see a memory and foundry logic balance contributors, or is is there some now of course, we're talking about the market. Is there one of those that will provide sort of unbalanced, contributions.
Yeah. So, Chris, I would say that, you know, we we haven't really I mean, we have stated very high level with those planning assumptions. And our view is that the market overall we'll be growing at about 5 to 6 percent, annually over over the period. And, And that's a blend of what we expect to see for MSI and CapEx. And that's far, frankly, as we we've been thinking about it.
I think a key takeaway for you when you hear us talk about the growth is really what we commit to deliver on top of the industry, whatever the industry ends up doing. And the way, we will do that is, you know, every year, at the beginning of the year, we will share with you with a little bit more specificity what we expect to see in the various segments of the industry and therefore, update the rate of, excess performance that you can expect. So again, For as for today, please keep it at at high level. I'm sure as we know that, you know, that this industry is is hard enough to, to predict. So we won't, we won't go, with, with more details for today.
Alright, Jim. This is one I know I can't answer. This is from. How is Integris preparing for the eventual reduction of quantum computing and hybrid chips that include gallium nitride and silicon carbide.
Okay. So let me ask answer the second part first. That's the easiest. So that the the There are a number of new materials that are coming into play in, in semiconductor's gallium nitride silicon carbide being 2 of them as a way to extend into the power device range. There's a lot of demand there for components for the automotive industry.
That's actually an area that our recent Sinmat acquisition is quite strong in the polishing of of hard materials. And so through that acquisition, we're not only able to participate in the market, but learn more about other applications and other, ways in which Entegris can play in that market. So that the power device market, silicon nitri, or gallium nitride, silicon carbide is an area that we are actively playing in. As far as quantum compute is concerned, we have, have our ear to the grounds, through, consortia, through, the the work that's being done, spearheaded by Yale. This being, that's some of the work that's being done by some people associated with with IBM.
At this point in time, we don't have specific materials programs, but we are listening right now. The unique demands for materials, are is not something that we have, found a a path into it at this point. It's not clear that the materials, are specifically unique to Quantum. It's more of the op the design and the operating temperature, which are the real challenges there. But as far as Gallium nitride and silicon carbide, we are actively playing there.
Okay. This is, for Bertran, and it's actually a combined I'm gonna combine a couple questions, from Patrick and Toshia. So, what is our competitive edge? When targeting potential acquisitions and the integration process, that allows us to hit these, financial targets that we what that we provide.
Well, I I think that, there was an earlier question around the the bandwidth that that we currently have, and I think that's actually, a very important question because you know, it's not about just closing an idea. It's the value is only unlikely if you can really properly integrate the, the companies that that you acquire. And And the best way to do that is really to start thinking about your integration plans as early as you can. And I think that an integrase, we we do that. We do that very well.
We start you know, usually when we start screening seriously a potential acquisition targets. We not only have a team looking at the target from a valuation standpoint, but we already are very early on a team starting to think about, integration opportunities and risks. And that plan actually continues to, to to evolve you know, as as we get closer to, to closing so that by the time we, we close a deal, we are really ready to execute very quickly on, on, on, on, on, on the integration, and we don't waste, we don't waste any time. So again, I think it's that, that focus that we have in, in most everything we do, and it triggers the intensity that we have. And and frankly, the great teams that we have that are able to to do those into complex integration projects very, very effectively.
And that comes
with experience, and that comes with
practice.
Okay. So next question, Oh, another one for Bertrand, Charles Xi from Need Needham, to quite a long question, but I'll sum it up and you know, when we talk about our sales to customers, we don't talk about the packaging end of the market, any plans to address that, anything in the portfolio that exists today?
Yeah. I mean, I I would certainly invite Jim to to jump in if he wants to add, but but it's true that, wafer level packaging is evolving very, very quickly. The processes are are becoming a lot more complex requiring more automation, more precision, cleaner, processes as well. And we are starting to, identify the number of areas for us to contribute around, you know, microenvironment solutions, but also in terms of chemistries, filtration and all of the traditional solutions that's that we have developed for, the front end, processing. Again, Jim, I don't know if there's anything specific that you wanna call out.
But again, this is this is a a a new transfer to me and I think that there are areas for us to contribute.
Yeah. I mean, I think if we look at it, we have looked at it from the roadmap perspective that particularly 3 d IC and certain aspects of, wafer level packaging, really represent an extension of wafer processing farther into the back end as you need to prepare the wafer for, through Silicon VEGIS, wafer level bonding, chip to wafer bonding, things like that. So that represents, I think, an expansion of the field in which we which we play. And we have been, working very closely with some of the leaders in the industry, some of the foundry players in that in that regard and are beginning to, identify, opportunities where Integra's can, contribute our materials and application knowledge.
Question from, Chris Strom. So how standardize our SCEM and MC products that customers use as they advance nodes probably one for Bertrand at least to start. If a customer is moving from 5 to 7 or 7 to 5, will it use the same products or you do you customize these solutions?
Well, 1st of all, I mean, at 7, a lot of the solutions are already customized. And our customers, again, are trying to migrate to the new node as quickly as they can, and they're gonna try to extend the materials and solutions as much as they can to minimize the number of changes and therefore, the risk of the transition. Having said that, every time they see a good reason to change the material because it would improve, you know, the performance of the chip, or or the cost of of of the trip, they would actually do that, and we will aggressively work with them. So it it it depends. But again, you know, all of the the changes that are being made are increasingly very unique to the integration scheme of of of a customer.
And, and I think that's why the, the incumbent advantage is is is so important in this industry because, you know, that allows you to have very unique insight. And therefore, allows you to shorten your time to solution for the next generation
Yeah. If I could just jump in here for 1, there's a figure of merit that I think the customer would look at it from the customer's perspective. A node to node transition would likely leave 70 to 75% of the processes the same. That accounts for the stickiness of materials in that space. It's the 25 to 30 percent the changes that represents the opportunities for innovation, and that's really an area where integris is focused.
Great. I got a probably just a few more questions here. So if you haven't sent anything and send it to me via email, so Greg, how would you, lay out the puts and takes of the operating margin targets for the 3 different, divisions
How would I say that again, build a puts and takes
They're all looking for increases in operating margin. So what are the drivers, really high level, what are the drivers for the 3 divisions to hit those increased operating margin targets.
So I would say in in in the in the MC division, I mean, it's gonna be, you know, the continuation of higher volumes, the continuation of Jim talked about advances in, membrane technology that allow us to continue to capture more value from the customer It's gonna be effectively adding new capacity in a in a sort of, in an efficient fashion. It allows us to continue to expand the margin. In the SCEM division, I think I would say and and we're in pretty good shape from a capacity perspective. So it's gonna be leveraging the existing capacity, continuing to develop, again, products that are are differentiated. Leveraging the capabilities that we've gotten from, the 2 acquisitions that we did last year.
And then I would say the AMH division where we don't expect quite as much growth, it's really, I mean, that's a division where to me, it's it's more about solid execution with the existing, you know, the existing footprint that we have, as well as some growth within, a couple of key areas liquid packaging, for instance, some opportunities within life sciences, those will those will all play into the AMH division.
And a little bit of, piggybacking on that. So, so Bertrand another question from Sydney Ho, the, the growth targets for AMH are a little bit higher in terms of a bug market growth than they were before. What's what's fundamentally changed in that business that gives, you us more, optimism about that business growth opportunities. AMH.
Right. Right. So I think, you know, Greg touched a little bit on that in his previous answer. I think there are a couple of product lines that we believe will, will benefit from, very favorable trends, especially around, liquid packaging solutions, both in in semi applications as well as in a adjacent markets. So that's gonna be a a nice driver for for AMH.
We also expect some of the recent acquisitions, PSS and GMTI to contribute nicely to the overall top line of, of the other additional good news is that both of those product areas of PSG MTI on one hand then, liquid, packaging solutions. On the other hand, I have usually better margin attributes than the overall, AMH you know, division traditionally. So we should they should have, you know, nice contribution, both the top line and to the margin profile of the business.
Excellent. Well, that wraps it up for today. Thank you very much for attending the Entegris investor and Analyst Day in 20 20 to virtual Analyst Day. We sure hope we can get back together live, as soon as possible, especially next time If you have any follows up, follow-up, or any additional questions, please reach out to me directly via phone or free to email. Thank you very much and have a great rest of the week.